Aberration retrieval from the intensity point-spread function in the focal region using the extended Nijboer-Zernike approach

Journal of Modern Optics

Volumn 52, Issue 12, 2005, Pages 1695-1728

  Van Der Avoort, C ^a   Braat, J J M ^a   Dirksen, P ^b   Janssen, A J E M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ESTIMATION; INVERSE PROBLEMS; OPTICAL PROPERTIES; STATISTICAL METHODS;

PURE-PHASE ABERRATIONS; ZERNIKE SERIES;

ABERRATIONS;

EID: 25144506822     PISSN: 09500340     EISSN: 13623044     Source Type: Journal    
DOI: 10.1080/09500340500072547     Document Type: Conference Paper

References (32)

1. T.A. Brunner, IBM J. Res. Dev. 41 57 (1997).
2. D.G. Flagello, H. van der Laan, J. van Schoot, et al., Proc. SPIE 3679 162 (1999).
3. N.R. Farrar, A.L. Smith, D. Busath, et al., Proc. SPIE 4000 18 (2000).
4. J.P. Kirk and T.A. Brunner, Proc. SPIE 2726 410 (1996).
5. P. Dirksen, C. Juffermans, R. Pellens, et al., Proc. SPIE 3679 77 (1999).
6. F. Zach, C.Y. Lin and J.P. Kirk, Proc. SPIE 4346 1362 (2001).
7. P. Dirksen, J.J.M. Braat, A.J.E.M. Janssen, et al., J. Microlith. Microfab. Microsyst. 2 61 (2003).
8. R.W. Gerchberg and W.O. Saxton, Optik. 34 275 (1971).
9. R.W. Gerchberg and W.O. Saxton, Optik. 35 237 (1972).
10. B.R. Frieden, J. Opt. Soc. Am. 62 511 (1972).
11. W.H. Richards, J. Opt. Soc. Am. 62 55 (1972).
12. J.R. Fienup, Appl. Opt. 21 2758 (1982).
13. J.R. Fienup, J.C. Marron, T.J. Schultz, et al., Appl. Opt. 32 1747 (1993).
14. J.G. Walker, Opt. Acta 28 735 (1981).
15. R. Gonsalves, Opt. Eng. 21 829 (1982).
16. J.R. Fienup, J. Opt. Soc. Am. A 16 1831 (1999).
17. D. van Dyck and W. Coene, Optik. 77 125 (1987).
18. B.R. Frieden and C. Oh, Appl. Opt. 31 1103 (1992).
19. E.S. Angel and A.K. Jain, Appl. Opt. 17 2186 (1978).
20. R. Barakat and B.H. Sandier, J. Opt. Soc. Am. A 19 1715 (1992).
21. I. Iglesias, Appl. Opt. 37 5427 (1998).
22. A.J.E.M. Janssen, J. Opt. Soc. Am. A 19 849 (2002).
23. M. Born and E. Wolf, Principles of Optics (Cambridge University Press, Cambridge, 2002).
24. A.J.E.M. Janssen, J.J.M. Braat and P. Dirksen, J. Mod. Opt. 51 687 (2004).
25. J.J.M. Braat, P. Dirksen and A.J.E.M. Janssen, J. Opt. Soc. Am. A 19 858 (2002).
26. P. Dirksen, J.J.M. Braat, P. De Bisschop, et al., Proc. SPIE 4691 1392 (2002).
27. P. Dirksen, J. Braat, A.J.E.M. Janssen, et al., Proc. SPIE 5040 1 (2003).
28. P. Dirksen, J.J.M. Braat, A.J.E.M. Janssen, et al., Proc. SPIE 5377 150 (2004).
29. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, et al., J. Opt. Soc. Am. A 20 2281 (2003).
30. J.J.M. Braat, P. Dirksen and A.J.E.M. Janssen, submitted to JOSA - A (2004).
31. F.G. Tricomi, Vorlesungen über Orthogonalreihen (Springer, Berlin, 1955).
32. M. Abramowitz and I.A. Stegun, Handbook of Mathematical Functions (Dover, New York, 1970).