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Journal of Non-Crystalline Solids

Volumn 351, Issue 37-39, 2005, Pages 3065-3074

Maskless patterning of borosilicate glass surface using nanoindentation-induced etch-hillock phenomena

(2) Youn, S W a Kang, C G a

a Pusan National University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; HAFNIUM COMPOUNDS; INDENTATION; NANOSTRUCTURED MATERIALS; PLASTIC DEFORMATION;

BOROSILICATE GLASS SURFACE; ETCH-HILLOCK STRUCTURES; ISOTROPIC ETCHING; MASKLESS PATTERNING;

BOROSILICATE GLASS;

EID: 24944538718 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2005.07.020 Document Type: Article

Times cited : (6)

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