Ductile-mode mirror cutting of single-crystal silicon (1st report) - Effects of cutting speed on the brittle/ductile mode transition behavior in cutting process

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 64, Issue 4, 1998, Pages 608-612

  Ichida, Yoshio ^a   Ben Frej, Nabil ^a   Yousefi, Reza ^a  

^a NONE

Author keywords

Brittle ductile mode transition; Critical depth of cut; Critical feed rate; Cutting speed; Ductile mode cutting; Mirror surface; Percentage of fracture surface; Single point diamond tool; Single crystal silicon

Indexed keywords

BRITTLE FRACTURE; BRITTLENESS; DIAMOND CUTTING TOOLS; DUCTILITY; PHASE TRANSITIONS; SILICON; SINGLE CRYSTALS; SPEED;

CRITICAL FEED RATE; CUTTING SPEED; DUCTILE MODE CUTTING; SINGLE POINT DIAMOND TOOL;

METAL CUTTING;

EID: 0032050323     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.64.608     Document Type: Article

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