FEA study on nanodeformation behaviors of amorphous silicon and borosilicate considering tip geometry for pit array fabrication

Materials Science and Engineering: A

Volumn 390, Issue 1-2, 2005, Pages 233-239

  Youn, S W ^a   Kang, C G ^a  

^a Pusan National University   (South Korea)

Author keywords

Amorphous silicon; Borosilicate; Elastic recovery; Indenter geometry; Nanoindentation; Pile up

Indexed keywords

BOROSILICATE GLASS; BRITTLENESS; COMPUTER SIMULATION; DEFORMATION; ELASTICITY; FINITE ELEMENT METHOD; INDENTATION; SILICATES; STRESS CONCENTRATION;

CONICAL INDENTERS; ELASTIC RECOVERY; HARD-BRITTLE MATERIALS; NANODEFORMATION;

AMORPHOUS SILICON;

DEFORMATION; FINITE ELEMENT ANALYSIS; INDENTATION;

EID: 10944261850     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2004.08.041     Document Type: Article

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