Design and fabrication of an integrated three-dimensional tactile sensor for space robotic applications

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 112-117

  Mei, Tao ^a   Ge, Yu ^a   Chen, Yong ^a   Ni, Lin ^a   Liao, Wei Hsin ^a   Xu, Yangsheng ^a   Li, Wen J ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT MANUFACTURE; NEURAL NETWORKS; ROBOT APPLICATIONS;

TACTILE SENSORS;

MICROSENSORS;

EID: 0032665778     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)