A six-component silicon micro force sensor

Sensors and Actuators, A: Physical

Volumn 65, Issue 2-3, 1998, Pages 109-115

  Jin, Welin L ^a   Mote Jr , C D ^b,c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Micro force sensors; Micromachining; Silicon

Indexed keywords

BONDING; EUTECTICS; GOLD; MICROMACHINING;

LORENTZ FORCE; SILICON MICRO FORCE SENSORS;

SILICON SENSORS;

EID: 0032520414     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01671-3     Document Type: Article

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