Sputtered high |d31| coefficient PZT thin film for micro actuators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 263-266

  Sakata, M ^a   Wakabayashi, S ^a   Goto, H ^a   Totani, H ^a   Takeuchi, M ^a   Yada, T ^a  

^a OMRON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ANNEALING; CRYSTAL ORIENTATION; ELASTIC MODULI; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; PEROVSKITE; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; STRESS ANALYSIS;

BUILT IN STRESS; MICROACTUATORS; PEROVSKITE STRUCTURE; PIEZOELECTRIC COEFFICIENT; POST ANNEAL PROCESS;

THIN FILMS;

EID: 0029775408     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)