Design, testing, and simulation of NiTi shape-memory-alloy thin-film-based microgrippers

Journal of Microlithography, Microfabrication and Microsystems

Volumn 2, Issue 3, 2003, Pages 185-190

  Huang, W M ^a   Tan, J P ^a   Gao, X Y ^a   Yeo, J H ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Fabrication; MEMS; Microgrippers; NiTi; Shape memory alloys; Simulation; Sputtering; Testing; Thin films

Indexed keywords

EID: 3042820462     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1585063     Document Type: Article

References (21)

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