Dynamic simulations of a novel RF MEMS switch

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 2, Issue , 2004, Pages 287-290

  Younis, Mohammad I ^a   Abdel Rahman, Eihab M ^a   Nayfeh, Ali H ^a  

^a Virginia Polytechnic Institute and State University   (United States)

Author keywords

Dynamic pull in; Electric actuation; Microbeams; RF switches

Indexed keywords

COMPUTER SIMULATION; DYNAMIC MECHANICAL ANALYSIS; ELECTRIC EXCITATION; ELECTRIC LOADS; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; FABRICATION; FREQUENCIES; PERTURBATION TECHNIQUES; RESONATORS; SWITCHES;

DYNAMIC PULL-IN; ELECTRIC ACTUATION; MICROBEAMS; RF SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 6344237246     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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