Design and fabrication of in situ UV-LIGA assembled robust nickel micro check valves for compact hydraulic actuators

Journal of Micromechanics and Microengineering

Volumn 15, Issue 10, 2005, Pages 1864-1871

  Li, Bo ^a   Chen, Quanfang ^a  

^a University of Central Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ELECTRON TUBES; MICROACTUATORS; RELIABILITY; ROBUSTNESS (CONTROL SYSTEMS);

FLOW RATE; HYDRAULIC ACTUATORS; MICROVALVE ARRAYS; UV-LIGA ASSEMBLING PROCESS;

NICKEL;

EID: 24644458642     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/10/011     Document Type: Article

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