Water distribution within immersed polymer films

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5753, Issue I, 2005, Pages 31-39

  Vogt, Bryan D ^a   Soles, Christopher L ^a   Prabhu, Vivek M ^a   Satija, Sushil K ^a   Lin, Eric K ^a   Wu, Wen Li ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Immersion lithography; Photolithography; Thin films

Indexed keywords

IMMERSION LITHOGRAPHY; REFLECTOMETRY; WATER CONCENTRATION; WATER DISTRIBUTION;

CONCENTRATION (PROCESS); INTERFACES (MATERIALS); PHOTOLITHOGRAPHY; PHOTORESISTS; SOLUBILITY; WATER;

PLASTIC FILMS;

EID: 24644457046     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.599746     Document Type: Conference Paper

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