Innovative rapid photo-goniometry method for CD metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5375, Issue PART 2, 2004, Pages 1302-1313

  Boher, P ^a   Luet, M ^a   Leroux, T ^a   Petit, J ^a   Barritault, P ^b   Hazart, J ^b   Chaton, P ^b  

^a ELDIM   (France)

^b CEA GRENOBLE   (France)

Author keywords

Fourier optics; OFT; Photo goniometry; Scatterometry

Indexed keywords

AZIMUTH ANGLE; OFT; PHOTO-GONIOMETRY; SCATTEROMETRY;

CAMERAS; CHARGE COUPLED DEVICES; DIFFRACTION; FOURIER OPTICS; POLARIMETERS; SCANNING ELECTRON MICROSCOPY;

GONIOMETERS;

EID: 4344715231     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.533426     Document Type: Conference Paper

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