Thin film material parameters derived from full field nanometric displacement measurements in non-uniform MEMS geometries

Materials Research Society Symposium - Proceedings

Volumn 795, Issue , 2003, Pages 527-532

  Cárdenas García, Jaime F ^b   Cho, Sungwoo ^a   Chasiotis, Ioannis ^a  

^a University of Virginia   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; DEFORMATION; ELASTIC MODULI; INVERSE PROBLEMS; LEAST SQUARES APPROXIMATIONS; POISSON RATIO; STRAIN; STRESS ANALYSIS; TENSILE STRESS; THIN FILMS;

DIGITAL IMAGE CORRELATION (DIC); LOAD LEVELS; NONLINEAR LEAST SQUARE ANALYSIS; TENSILE STRAIN;

MICROELECTROMECHANICAL DEVICES;

EID: 2442625494     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-795-u11.28     Document Type: Conference Paper

References (19)

1. J. Johansson, J. Schweitz, L. Tenerz and J. Tirén, J. of Appl. Phys., 63 (10), 4799 (1988).
2. I. Chasiotis and W.G. Knauss, in Encyclopedia of Comprehensive Structural Integrity Vol. 8. Interfacial and Nanoscale Failure, edited by W. Gerberich and W. Yang, (Elsevier Science, 2003) pp. 41-87.
3. A.S.T.M., ASTM Standard E111-98, (ASTM, West Conshohocken, PA, 1998).
4. A.S.T.M., ASTM Standard E132-97, (ASTM, West Conshohocken, PA, 1998).
5. W.N. Sharpe, B. Yuan and R.Vaidyanathan, Proc. of IEEE MEMS, Nagoya, Japan, 424 (1997).
6. D.A. LaVan, T. Tsuchiya, G. Coles, W.G. Knauss, I. Chasiotis, D. Read, ASTM STP 1413, (ASTM, W. Conshohocken, PA, 2001).
7. I. Chasiotis and W.G. Knauss, Proc. of the SPIE 3512, pp. 66-75, 1998.
8. I. Chasiotis and W.G. Knauss, Proc. of SPIE 4175, pp. 96-103, 2000.
9. I. Chasiotis, S. W. Cho, T.A. Friedman and J.P. Sullivan, Proc. of SEM, pp. 170-175, 2003.
10. I. Chasiotis and W.G. Knauss, Exp. Mech. 42 (1), 51 (2002).
11. J.F. Cárdenas-García, S. Ekwaro-Osire and J.M. Berg, Mech. Res. Comm. 28 (1), 13 (2001).
12. A.S. Saada, Elasticity: Theory and Applications, Pergamon Press, New York, 1974.
13. R.J. Sanford, Exp. Mech. 20, 192 (1980).
14. R.J. Sanford and J.W. Dally, Eng. Fract. Mech. 11, 621 (1979).
15. I. Chasiotis and W.G. Knauss, Proc. of the MRS 687, pp. B2.4.1- B2.4.6, (2002).
16. I. Chasiotis and W.G. Knauss, J. of the Mech. Phys. of Solids, 51, 1551 (2003).
17. G. Vendroux and W.G. Knauss, Exp. Mech. 38 (2), 86 (1998).
18. I. Chasiotis and W.G. Knauss, Proc. of the MRS 657, pp. EE2.2.1- EE2.2.6 (2001).
19. I. Chasiotis and W.G. Knauss, J. of the Mech. Phys. of Solids, 51, 1533 (2003).