Oxidation and heat treatment effect on crystal structure and electrical conductivity of ferroelectric Pb(Zr, Ti)O3 films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 9 SUPPL. B, 1996, Pages 5002-5007

  Masuda, Yoichiro ^a   Baba, Akira ^a  

^a Hachinohe Institute of Technology   (Japan)

Author keywords

Coercive field; Dielectric constant; Lead zirconate titanate (PZT); Leakage current; Metalorganic chemical vapor deposition (MOCVD); Oxygen pressure during heat treatment; Remanent polarization

Indexed keywords

COERCIVE FIELD; DIELECTRIC CONSTANT; REMANENT POLARIZATION;

DIELECTRIC PROPERTIES OF SOLIDS; ELECTRIC CONDUCTIVITY; FERROELECTRIC MATERIALS; HEAT TREATMENT; LEAKAGE CURRENTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION;

THIN FILMS;

EID: 0030235605     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.5002     Document Type: Article

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