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Volumn 522, Issue , 1998, Pages 245-250
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Mechanical properties of TiN thin films measured using nanoindentation and bulge test
a
a
EPFL
(Switzerland)
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPRESSIVE STRENGTH;
ELASTIC MODULI;
HARDNESS;
MAGNETRON SPUTTERING;
MECHANICAL VARIABLES MEASUREMENT;
MORPHOLOGY;
PRESSURE EFFECTS;
RESIDUAL STRESSES;
SILICON NITRIDE;
SILICON WAFERS;
TENSILE STRESS;
THIN FILMS;
BULGE TESTS;
NANOINDENTATION;
TITANIUM NITRIDE;
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EID: 0032311629
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (5)
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References (18)
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