Defects and failure modes in PZT films for a MEMS microengine

Materials Research Society Symposium - Proceedings

Volumn 657, Issue , 2001, Pages

  Bahr, D F ^a   Crozier, B T ^a   Richards, C D ^a   Richards, R F ^a  

^a Washington State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; DEPOSITION; FATIGUE TESTING; INTERFEROMETERS; MICROMACHINING; PIEZOELECTRIC MATERIALS; SILICON WAFERS; STRAIN; THERMAL STRESS;

MICROENGINES;

MICROELECTROMECHANICAL DEVICES;

EID: 4243290431     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)