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Volumn 44, Issue 6, 2004, Pages 909-916

Voltage acceleration and t63.2 of 1.6-10 nm gate oxides

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; DATA ACQUISITION; DATA REDUCTION; ELECTRIC BREAKDOWN; ELECTRIC POTENTIAL; MATHEMATICAL MODELS; WEIBULL DISTRIBUTION;

EID: 2442481862     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2004.02.005     Document Type: Article
Times cited : (13)

References (18)
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    • (2001) IEEE Trans. Device Mater. Reliab. , vol.1 , pp. 69-80
    • Wu, E.1    Nowak, E.2    Vayshenker, A.3    Mckenna, J.4    Harmon, D.5    Vollertsen, R.-P.6
  • 3
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    • Percolation theory
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    • Stathis, J.H.1
  • 6
    • 0001320103 scopus 로고    scopus 로고
    • Explanation for the polarity dependence of breakdown in ultrathin silicon dioxide films
    • DiMaria D.J. Explanation for the polarity dependence of breakdown in ultrathin silicon dioxide films. Appl. Phys. Lett. 68:1996;3004-3006.
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 3004-3006
    • DiMaria, D.J.1
  • 7
    • 0033741528 scopus 로고    scopus 로고
    • Experimental evidence for voltage driven breakdown models in ultrathin gate oxides
    • Nicollian P.E., Hunter W.R., Hu J.C. Experimental evidence for voltage driven breakdown models in ultrathin gate oxides. Int. Reliab. Phys. Sympos. Proc. 2000;7-15.
    • (2000) Int. Reliab. Phys. Sympos. Proc. , pp. 7-15
    • Nicollian, P.E.1    Hunter, W.R.2    Hu, J.C.3
  • 8
    • 0033733540 scopus 로고    scopus 로고
    • Field acceleration for oxide breakdown - Can an accurate anode hole injection model resolve the E vs. 1/E controversy
    • Alam M.A., Bude J., Ghetti A. Field acceleration for oxide breakdown - Can an accurate anode hole injection model resolve the. E vs. 1/E controversy Int. Reliab. Phys. Sympos. Proc. 2000;21-26.
    • (2000) Int. Reliab. Phys. Sympos. Proc. , pp. 21-26
    • Alam, M.A.1    Bude, J.2    Ghetti, A.3
  • 9
    • 0035498590 scopus 로고    scopus 로고
    • Modeling the breakdown and breakdown statistics of ultra-thin SiO2 gate oxides
    • Suñé J., Wu E. Modeling the breakdown and breakdown statistics of ultra-thin SiO2 gate oxides. Microelectron. Eng. 59:2001;149-153.
    • (2001) Microelectron. Eng. , vol.59 , pp. 149-153
    • Suñé, J.1    Wu, E.2
  • 12
    • 0031332017 scopus 로고    scopus 로고
    • Ultimate limit for defect generation in ultra-thin silicon dioxide
    • DiMaria D.J., Stathis J.H. Ultimate limit for defect generation in ultra-thin silicon dioxide. Appl. Phys. Lett. 71:1997;3230-3232.
    • (1997) Appl. Phys. Lett. , vol.71 , pp. 3230-3232
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  • 14
    • 67649507364 scopus 로고    scopus 로고
    • Physical and predictive models of ultra thin oxide reliability in CMOS devices and circuits
    • Stathis J.H. Physical and predictive models of ultra thin oxide reliability in CMOS devices and circuits. Int. Reliab. Phys. Sympos. Proc. 2001;132-149.
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    • Trap creation in silicon dioxide produced by hot electrons
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  • 17
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    • Mechanism for stress-induced leakage currents in thin silicon dioxide films
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.