Use of an indium zinc oxide interlayer for forming Ag-based Ohmic contacts to p-type GaN for UV-light-emitting diodes

Semiconductor Science and Technology

Volumn 20, Issue 9, 2005, Pages 921-924

  Ban, Keun Yong ^a   Hong, Hyun Gi ^a   Noh, Do Young ^a   Seong, Tae Yeon ^a   Song, June O ^b   Kim, Donghwan ^c  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c Korea University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC RESISTANCE; GALLIUM NITRIDE; LIGHT EMISSION; LIGHT EMITTING DIODES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; TRANSMISSION ELECTRON MICROSCOPY; X RAY SPECTROSCOPY;

CONTACT RESISTANCE; FORWARD VOLTAGE; OHMIC FORMATION; RECTIFYING BEHAVIOR;

OHMIC CONTACTS;

EID: 23944527303     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/20/9/006     Document Type: Article

References (20)

1. Merfeld D W, Cao X A, Leboeuf S F, Arthur S D, Kretchmer J W and D'Evelyn M P 2004 J. Electron. Mater. 33 11
2. Wierer J J et al 2001 Appl. Phys. Lett. 78 3379
3. Kim H C and Alford T L 2003 J. Appl. Phys. 94 5393
4. Song J-O, Kwak J S, Park Y and Seong T-Y 2005 Appl. Phys. Lett. 86 062104
5. Hibbard D L, Jung S P, Wang C, Ullery D, Zhao Y S, Lee H P, So W and Liu H 2003 Appl. Phys. Lett. 83 311
6. Kim S Y and Lee J-L 2004 Electrochem. Solid-State Lett. 7 G102
7. Song J-O, Leem D-S, Kwak J S, Nam O H, Park Y and Seong T-Y 2003 Appl. Phys. Lett. 83 4990
8. Song J-O, Kwak J S and Seong T-Y 2005 Appl. Phys. Lett. 86 062103
9. Marlow G S and Das M B 1982 Solid-State Electron. 25 91
10. Jang J-S, Park S J and Seong T-Y 1999 J. Vac. Sci. Technol. B 17 2667
11. Song J-O, Leem D-S, Kwak J S, Nam O H, Park Y and Seong T-Y 2004 IEEE Photon. Technol. Lett. 16 1450
12. Song J-O, Leem D-S and Seong T-Y 2003 Appl. Phys. Lett. 83 3513
13. Jang J S and Seong T-Y 2000 J. Appl. Phys. 88 3064
14. Bermudez V M, Koleske D D and Wickenden A E 1998 Appl. Surf. Sci. 126 69
15. Tung R T et al 1992 Phys. Rev. B 45 13509
16. Lee S K, Zettering C M, Ostling M, Aberg I, Magnusson M H, Deppert K, Wernersson L E, Samuelson L and Litwin A 2002 Solid-State Electron. 46 1433
17. Song J-O and Seong T-Y 2004 Appl. Phys. Lett. 85 6374
18. Rhoderick E H and Williams R H 1988 Metal-Semiconductor Contacts (Oxford: Clarendon) p 39
19. Sohn J I, Song J-O, Leem D-S, Lee S and Seong T-Y 2004 Electrochem. Solid-State Lett. 7 G179
20. Song J-O, Kwak J S, Park Y and Seong T-Y 2005 Appl. Phys. Lett. 86 062104