Effect of Pt on agglomeration and Ge out diffusion in Ni(Pt) germanosilicide

Journal of Applied Physics

Volumn 98, Issue 3, 2005, Pages

  Jin, L J ^a   Pey, K L ^a,b   Choi, W K ^a,c   Fitzgerald, E A ^a,d   Antoniadis, D A ^a,d   Pitera, A J ^a,d   Lee, M L ^a,d   Chi, D Z ^e   Rahman, Md A ^c   Osipowicz, T ^c   Tung, C H ^f  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^d MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^e INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^f INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC DIFFUSIONS; GERMANOSILICIDE; KINETIC EFFECTS; MICRO-RAMAN SPECTROSCOPY;

AGGLOMERATION; DIFFUSION; GERMANIUM COMPOUNDS; GRAIN BOUNDARIES; RAMAN SPECTROSCOPY; SILICATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

PLATINUM ALLOYS;

EID: 23944526365     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1977196     Document Type: Article

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