Wavelength-dependent effect of ultraviolet irradiation on dielectric constant of boron carbon nitride films

Journal of Applied Physics

Volumn 98, Issue 3, 2005, Pages

  Zhang, Zhengjun ^a   Kimura, Chiharu ^a   Sugino, Takashi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BCN FILMS; BORON CARBON NITRIDE (BCN); ULTRAVIOLET IRRADIATION; ULTRAVIOLET LIGHTS;

CHEMICAL BONDS; IRRADIATION; MONOCHROMATORS; NITRIDES; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLARIZATION; ULTRAVIOLET RADIATION;

BORON COMPOUNDS;

EID: 23944475089     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1999023     Document Type: Article

References (16)

1. L. L. Chapelon, V. Arnal, M. Broekaart, L. G. Gosset, J. Vitiello, and J. Torres, Microelectron. Eng. 76, 1 (2004).
2. S. Sugahara, T. Fukumura, and M. Matsumura, Mater. Sci. Semicond. Process. 3, 79 (2000).
3. Y. Furukawa, R. Wolters, H. Roosen, J. H. M. Snijders, and R. Hoofman, Microelectron. Eng. 76, 25 (2004).
4. T. Sugino and T. Tai, Jpn. J. Appl. Phys., Part 2 39, 1101 (2000).
5. T. Sugino, Y. Etou, T. Tai, and H. Mori, Appl. Phys. Lett. 80, 649 (2001).
6. T. Sugiyama, T. Tai, and T. Sugino, Appl. Phys. Lett. 80, 4214 (2002).
7. T. Tai, T. Sugiyama, and T. Sugino, Diamond Relat. Mater. 12, 1117 (2003).
8. T. Sugino, K. Tanioka, S. Kawasaki, and J. Shirafuji, Jpn. J. Appl. Phys., Part 2 36, 463 (1997).
9. M. C. Polo, E. Martinez, J. Esteve, and J. L. Andujar, Diamond Relat. Mater. 7, 376 (1998).
10. N. Laidani, M. Anderle, R. Canteri, L. Elia, A. Luches, M. Martino, V. Micheli, and G. Speranza, Appl. Surf. Sci. 157, 135 (2000).
11. X. Gouin, P. Gronge, L. Bois, P. L'Haridon, and Y. Laurent, J. Alloys Compd. 224, 22 (1995).
12. M. N. Oliveira, A. M. Botelho do Rego, and O. Conde, Surf. Coat. Technol. 100-101, 398 (1998).
13. D. Marton, K. J. Boyd, A. H. Albayati, S. S. Todorov, and J. W. Rabalais, Phys. Rev. Lett. 73, 118 (1994).
14. T. Sugino, T. Tai, and Y. Etou, Diamond Relat. Mater. 10, 1375 (2001).
15. M. O. Watanabe, S. Itoh, and K. Mizushima. Appl. Phys. Lett. 68, 21 (1996).
16. A. Perrone, A. P. Caricato, A. Luches, M. Dinescu, C. Ghica, V. Sandu, and A. Andrei, Appl. Surf. Sci. 133, 239 (1998).