Effects of the bias enhanced nucleation hot-filament chemical-vapor deposition parameters on diamond nucleation on iridium

Journal of Applied Physics

Volumn 98, Issue 3, 2005, Pages

  Arnault, J C ^a,d   Schull, G ^a   Polini, R ^b   Mermoux, M ^c   Faerber, J ^d  

^a DIF   (France)

^b UNIVERSITY OF ROME TOR VERGATA   (Italy)

^c LEPMI   (France)

^d INSTITUT DE PHYSIQUE ET CHIMIE DES MATÉRIAUX DE STRASBOURG   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND NUCLEATION; HOT-FILAMENT CHEMICAL-VAPOR DEPOSITION (HFCVD); IRIDIUM BUFFER LAYERS; NUCLEATION DENSITY;

CURRENT DENSITY; DIFFUSION; GRAPHITE; IRIDIUM COMPOUNDS; MICROWAVES; NUCLEATION; SCANNING ELECTRON MICROSCOPY;

CHEMICAL VAPOR DEPOSITION;

EID: 23944469903     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1999027     Document Type: Article

References (28)

1. M. Schreck, F. Hörmann, H. Roll, T. Bauer, and B. Stritzker, New Diamond Front. Carbon Technol. 11, 189 (2001).
2. F. Hörmann, H. Y. Peng, Th. Bauer, Q. Li, M. Schreck, Y. Lifshitz, S. T. Lee, and B. Stritzker, Surf. Sci. 513, 525 (2002).
3. F. Hörmann, Th. Bauer, M. Schreck, S. Gsell, and B. Stritzker, Diamond Relat. Mater. 12, 350 (2003).
4. J. C. Arnault, F. Vonau, M. Mermoux, F. Wyczisk, P. Legagneux, Diamond Relat. Mater. 13, 401 (2004).
5. J. C. Arnault, L. Demuynck, C. Speisser, and F. Le Normand, Eur. Phys. J. B 11, 327 (1999).
6. L. Constant, C. Speisser, and F. Le Normand, Surf. Sci. 387, 28 (1997).
7. J. C. Arnault, F. Vonau, J. Faerber, J. Arabski, G. Schmerber, F. Wyczisk, and P. Legagneux, Phys. Status Solidi A 199, 27 (2003).
8. J. J. Dubray, C. G. Pantano, and W. A. Yarbrough, J. Appl. Phys. 72, 3136 (1992).
9. Handbook of Auger Electron Spectroscopy, 2nd edition, edited by, L. E. Davis, N. C. MacDonald, P. W. Palmberg, G. E. Riach, and R. E. Weber, (Perkin-Elmer Corp., Eden Prairie, MN, 1978).
10. R. Polini, M. Tomellini, M. Fanfoni, and F. Le Normand, Surf. Sci. 373, 230 (1997).
11. M. Schreck, Th. Bauer, S. Gsell, F. Hörmann, H. Bielefeldt, and B. Stritzker, Diamond Relat. Mater. 12, 262 (2003).
12. T. Fujisaki, M. Tachiki, N. Taniyama, M. Kudo, and H. Kawarada, Diamond Relat. Mater. 12, 246 (2003).
13. B. Golding, C. Bednarski-Meinke, and Z. Dai, Diamond Relat. Mater. 13, 545 (2004).
14. X. Jiang, K. Schiffmann, and C. P. Klages, Phys. Rev. B 50, 8402 (1994).
15. J. C. Arnault, F. Vonau, F. Wyczisk, and P. Legagneux Diamond Relat. Mater. 13, 261 (2004).
16. J. Robertson, Diamond Relat. Mater. 4, 549 (1995).
17. S. Uhlmann, Th. Frauenheim, and Y. Lifshitz, Phys. Rev. Lett. 81, 641 (1998).
18. K. Tankala and T. DebRoy, J. Appl. Phys. 72, 712 (1992).
19. K. E. Spear, J. Am. Chem. Soc. 72, 171 (1989).
20. J. W. Kim, Y. J. Baik, and K. Y. Eun, Diamond Relat. Mater. 1, 200 (1992).
21. W. A. Yarbrough, K. Tankala, M. Mecray, and T. Debroy Appl. Phys. Lett. 60, 2068 (1992).
22. F. Hörmann, M. Schreck, and B. Stritzker, Diamond Relat. Mater. 10, 1617 (2001).
23. S. Katai, Z. Tass, G. Hars, and P. Deak, J. Appl. Phys. 86, 5549 (1999).
24. W. L. Wang, G. Sanchez, M. C. Polo, R. Q. Zhang, and J. Esteve, Appl. Phys. A: Mater. Sci. Process. 65, 241 (1997).
25. I. Gouzman and A. Hoffman, Diamond Relat. Mater. 7, 209 (1998).
26. T. Tsubota, M. Ohta, K. Kusakabe, S. Morooka, M. Watanabe, and H. Maeda, Diamond Relat. Mater. 9, 1380 (2000).
27. Th. Bauer, M. Schreck, F. Hörmann, A. Bergmaier, G. Dollinger, and B. Stritzker, Diamond Relat. Mater. 11, 493 (2002).
28. T. Fujisaki, M. Tachiki, N. Taniyama, M. Kudo, and H. Kawarada, Diamond Relat. Mater. 12, 246 (2003).