Measurement of ion energy distributions in the bias enhanced nucleation of chemical vapor deposited diamond

Journal of Applied Physics

Volumn 86, Issue 10, 1999, Pages 5549-5555

  Katai Sz ^a   Tass, Z ^a   Hars Gy ^a   Deak P ^a  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042046655     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371559     Document Type: Article

References (23)

1. S. Yugo, T. Kanai, T. Kimura, and T. Muto, Appl. Phys. Lett. 58, 1036 (1991).
2. B. R. Stoner, G.-H. M. Ma, D. S. Wolter, and J. T. Glass, Phys. Rev. B 45, 11067 (1992).
3. X. Jiang, R. Six, C.-P. Klages, R. Zachai, M. Hartweg, and H.-J. Füser, Diamond Relat. Mater. 2, 407 (1992).
4. S. McGinnis, M. Kelly, and S. Hagström, Appl. Phys. Lett. 66, 3117 (1995).
5. X. Jiang, M. Paul, C.-P. Klages, and C. L. Jia, in Proceedings of the 4th International Symposium on Diamond Materials, edited by K. Ravi and J. Dismukes (The Electrochemical Society, Pennington, NJ, 1995), p. 50.
6. Y. Liftshitz, S. R. Kasi, J. W. Rabalais, and W. Eckstein, Phys. Rev. B 41, 10468 (1990).
7. Y. Liftshitz, S. R. Kasi, and J. W. Rabalais, Phys. Rev. Lett. 68, 1290 (1989).
8. P. Deák, A. Gali, G. Sczigel, and H. Ehrhardt, Diamond Relat. Mater. 4, 706 (1995).
9. J. Robertson, J. Gerber, S. Sattel, M. Weiler, K. Jung, and H. Ehrhardt, Appl. Phys. Lett. 66, 3287 (1995).
10. J. Robertson, Diamond Relat. Mater. 4, 549 (1995).
11. R. Stöckel, M. Stamer, K. Janischowsky, L. Ley, M. Albrecht, and H. P. Strunk, J. Appl. Phys. 83, 531 (1998).
12. X. Juang, K. Schiffmann, and C.-P. Klages, Phys. Rev. B 50, 8402 (1994).
13. J. Gerber, M. Weiler, O. Sohr, K. Jung, and H. Ehrhardt, Diamond Relat. Mater. 3, 506 (1994).
14. W. Kulish, L. Ackermann, and B. Sobisch, Phys. Status Solidi A 154, 155 (1996).
15. P. Avakowicz, R. Schwefel, M. Werder, and W. Kasper, Diamond Relat. Mater. 6, 1816 (1997).
16. D. Heim and H. Störi, J. Appl. Phys. 72, 3330 (1992).
17. S. P. McGinnis, M. A. Kelly, and S. B. Hagström, Proc.-Electrochem. Soc. 4, 73 (1995).
18. S. P. McGinnis, M. A. Kelly, and S. B. Hagström, J. Mater. Res. 12, 3354 (1997).
19. Sz. Kátai, Z. Tass, J. Geelhaar, L. Bori, Gy. Hárs, and P. Deák, Rev. Sci. Instrum. 70, 3324 (1999).
20. Z. Tass, Ph.D. thesis, Tu Budapest, Hungary.
21. M. C. McMaster, W. L. Hsu, M. E. Coltrin, D. S. Dandy, and C. Fox, Diamond Relat. Mater. 4, 1000 (1995).
22. Sz. Kátai, Z. Tass, Gy. Hárs, and P. Deák, Diamond Relat. Mater. (to be published).
23. J. S. Lee, K. S. Liu, and I.-N. Lin, Appl. Phys. Lett. 67, 1555 (1995).