Measurement of mechanical properties of three-dimensional nanometric objects by an atomic force microscope incorporated in a scanning electron microscope

Review of Scientific Instruments

Volumn 73, Issue 7, 2002, Pages 2647-

  Fukushima, Kimitake ^a   Kawai, Shigeki ^a   Saya, Daisuke ^a   Kawakatsu, Hideki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

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EID: 0036640598     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1488150     Document Type: Article

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