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Journal of the Electrochemical Society

Volumn 152, Issue 7, 2005, Pages

The Ohmic conduction mechanism in high-dielectric-constant ZrO2 thin films

(5) Wang, Ming Tsong a Deng, Shao You a Wang, Tsung Hong a Cheng, Bonds Yi Yi a Lee, Joseph Ya Min a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC CONDUCTIVITY; ELECTRIC FIELDS; ELECTRIC INSULATORS; ELECTRODES; ELECTRONS; HYSTERESIS; MAGNETRON SPUTTERING; PERMITTIVITY; SEMICONDUCTOR MATERIALS; ZIRCONIUM COMPOUNDS;

CONDUCTION MECHANISM; FILM DEPOSITION; METAL-INSULATOR-SEMICONDUCTORS; OHMIC CONDUCTION;

THIN FILMS;

EID: 23744495467 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1931308 Document Type: Article

Times cited : (23)

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