Stitching interferometry of aspherical surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4449, Issue , 2001, Pages 265-275

  Hansel T ^a   Nickel, A ^a   Schindler, A ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Aspherical surfaces; Stitching interferometry; Sub aperture interferometry

Indexed keywords

COMPUTER APPLICATIONS; OPTICAL VARIABLES MEASUREMENT; REGRESSION ANALYSIS; STATISTICAL METHODS;

OPTICAL PLANE SURFACE TOPOLOGIES; STITCHING INTERFEROMETRY; SUB-APERTURE INTERFEROMETRY;

INTERFEROMETRY;

EID: 0035760744     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.450103     Document Type: Conference Paper

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