Characterizing surface roughness of thin films by polarized light scattering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5188, Issue , 2003, Pages 264-275

  Germer, Thomas A ^a   Fasolka, Michael J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Block copolymer; Overlay; Polarization; Roughness; Scattering; Silicon dioxide; Thin films

Indexed keywords

CONFORMAL FILM; DIELECTRIC MULTILAYERS; PHASE CORRELATION; TOPOGRAPHIC FEATURES;

BLOCK COPOLYMERS; DATA REDUCTION; DIELECTRIC FILMS; ELECTRIC FIELDS; LIGHT POLARIZATION; LIGHT SCATTERING; LITHOGRAPHY; OPTICAL DATA STORAGE; PERTURBATION TECHNIQUES; SILICA; SURFACE ROUGHNESS;

THIN FILMS;

EID: 2342463649     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.506909     Document Type: Conference Paper

References (23)

1. T.A. Germer, C.C. Asmail, and B.W. Scheer, "Polarization of out-of-plane scattering from microrough silicon," Opt. Lett. 22, 1284-1286 (1997).
2. T.A. Germer, "Angular dependence and polarization of out-of-plane optical scattering from participate contamination, subsurface defects, and surface microroughness," Appl. Opt. 36, 8798-8805 (1997).
3. T.A. Germer and C.C. Asmail, "Polarization of light scattered by microrough surfaces and subsurface defects," J. Opt. Soc. Am. A 16, 1326-1332 (1999).
4. L. Sung, G.W. Mulholland, and T.A. Germer, "Polarized light-scattering measurements of dielectric spheres upon a silicon surface," Opt. Lett. 24, 866-868 (1999).
5. E. Kröger and E. Kretschmann, "Scattering of light by slightly rough surfaces or thin films including plasma resonance emission," Z. Physik 237, 1-15 (1970).
6. J.C. Stover, Optical Scattering: Measurement and Analysis, (SPIE Optical Engineering Press, Bellingham, WA, 1995).
7. T.A. Germer and C.C. Asmail, "Microroughness-blind optical scattering instrument," United States Patent 6,034,776 (2000).
8. F.E. Nicodemus, J.C. Richmond, J.J. Hsia, I.W. Ginsberg, and T. Limperis, Geometrical Considerations and Nomenclature for Reflectance, (National Bureau of Standards, Gaithersburg, 1977).
9. H.C. van de Hulst, Light Scattering by Small Particles, (Dover, New York, 1981).
10. C.F. Bohren and D.R. Huffman, Absorption and Scattering of Light by Small Particles, (Wiley, New York, 1983).
11. D.S. Flynn and C. Alexander, "Polarized surface scattering expressed in terms of a bidirectional reflectance distribution function matrix," Opt. Eng. 34, 1646-1650 (1995).
12. J.M. Elson, "Multilayer-coated optics: guided-wave coupling and scattering by means of interface random roughness," J. Opt. Soc. Am. A 12, 729-742 (1995).
13. J.M. Elson, J.P. Rahn, and J.M. Bennett, "Light scattering from multilayer optics: comparison of theory and experiment," Appl. Opt. 19, 669-679 (1980).
14. J.M. Elson, "Diffraction and diffuse scattering from dielectric multilayers," J. Opt. Soc. Am. 69, 48-54 (1979).
15. J.M. Elson, "Infrared light scattering from surfaces covered with multiple dielectric overlayers," Appl. Opt. 16, 2872-2881 (1977).
16. J.M. Elson, "Light scattering from surfaces with a single dielectric overlayer," J. Opt. Soc. Am. 66, 682-694 (1976).
17. T.A. Germer, SCATMECH: Polarized Light Scattering C++ Class Library, http://physics.nist.gov/scatmech.
18. T.A. Germer and C.C. Asmail, "Goniometric optical scatter instrument for out-of-plane ellipsometry measurements," Rev. Sci. Instr. 70, 3688-3695 (1999).
19. T.A. Germer and C.C. Asmail, "A goniometric optical scatter instrument for bidirectional reflectance distribution function measurements with out -of-plane and polarimetry capabilities," in Scattering and Surface Roughness, Z.-H. Gu and A.A. Maradudin, Eds., Proc. SPIE 3141, 220-231, (1997).
20. B.W. Scheer, "Development of a physical haze and microroughness standard," in Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, J.C. Stover, Ed., Proc. SPIE 2862, 78-95, (1996).
21. T.A. Germer, "Measurement of roughness of two interfaces of a dielectric film by scattering ellipsometry," Phys. Rev. Lett. 85, 349-352 (2000).
22. M.J. Fasolka and A.M. Mayes, "Block copolymer thin films: Physics and applications," Ann. Rev. Mater. Res. 31, 323-355 (2001).
23. M.J. Fasolka, T.A. Germer, and A. Karim, in preparation (2003).