Goniometric optical scatter instrument for bidirectional reflectance distribution function measurements with out-of-plane and polarimetry capabilities

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3141, Issue , 1997, Pages 220-231

  Germer, Thomas A ^a   Asmail, Clara C ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

BRDF; Goniometer; Polarimetry

Indexed keywords

DISTRIBUTION FUNCTIONS; ELLIPSOMETRY; FOURIER TRANSFORMS; FRICTION; GONIOMETERS; INSTRUMENTS; POLARIMETERS; POLAROGRAPHIC ANALYSIS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

BRDF; FUNCTION MEASUREMENTS; GONIOMETER; MUELLER MATRICES; NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (NISTO); POLARIMETRY; RAYLEIGH;

MEASUREMENTS;

EID: 58649105984     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.279240     Document Type: Conference Paper

References (18)

1. J. C. Stover, Optical Scattering: Measurement and Analysis, (McGraw-Hill, New York, 1990).
2. E. R. Méndez, A. G. Navarrete, and R. E. Luna, "Statistics of the polarization properties of one-dimensional randomly rough surfaces," J. Opt. Soc. Am. A 12, 2507-16 (1995).
3. D. L. Jordan, G. D. Lewis, and E. Jakeman, "Emission polarization of roughened glass and aluminum surfaces," Appl. Opt. 35, 3583-90 (1996).
4. S.-M. F. Nee, "Polarization of specular reflection and near-specular scattering by a rough surface," Appl. Opt. 35, 3570-82 (1996).
5. T. A. Germer, "Angular dependence and polarization of out-of-plane optical scattering from particulate contamination, subsurface defects, and surface microroughness," (submitted for publication.).
6. T. A. Germer, C. C. Asmail, and B. W. Scheer, "The polarization of out-of-plane scattering from microrough silicon," (submitted for publication.).
7. R. E. Luna, "Scattering by one-dimensional random rough metallic surfaces in a conical configuration: several polarizations," Opt. Lett. 21, 1418-20 (1996).
8. W. S. Bickel, R. R. Zito, and V. Iafelice, "Polarized Light Scattering From Metal Surfaces," J. Appl. Phys. 61, 5392 (1987).
9. V. J. Iafelice, and W. S. Bickel, "Polarized Light-Scattering Matrix Elements for Select Perfect and Perturbed Optical Surfaces," Appl. Opt. 26, 2410-5 (1987).
10. G. Videen, J.-Y. Hsu, W. S. Bickel, and W. L. Wolfe, "Polarized light scattered from rough surfaces," J. Opt. Soc. Am. A 9, 1111-8 (1992).
11. E. Bahar, and M. A. Fitzwater, "Like- and cross-polarized cross sections for random rough surfaces: theory and experiment," J. Opt. Soc. Am. A 2, 2295-303 (1985).
12. C. C. Asmail, C. L. Cromer, J. E. Proctor, and J. J. Hsia, "Instrumentation at the National Institute of Standards and Technology for bidirectional reflectance distribution function (BRDF) measurements," Proc. SPIE 2260, 52-61 (1994).
13. C. Asmail, J. Hsia, A. Parr, and J. Hoeft, "Rayleigh scattering limits for low-level bidirectional reflectance distribution function measurements," Appl. Opt. 33, 6084-91 (1994).
14. R. M. A. Azzam, "Photopolarimetric measurement of the Mueller matrix by Fourier analysis of a single detected signal," Opt. Lett. 2, 148 (1978).
15. H. C. v. d. Hulst, Light Scattering by Small Particles, (Dover, New York, 1981).
16. C. F. Bohren, and D. R. Huffman, Absorption and Scattering of Light by Small Particles, (Wiley, New York, 1983).
17. S. O. Rice, "Reflection of Electromagnetic Waves from Slightly Rough Surfaces," Comm. Pure and Appl. Math. 4, 351-78 (1951).
18. D. E. Barrick, Radar Cross Section Handbook, (Plenum, New York, 1970).