Finite-element simulation of micro-electromechanical systems (MEMS) by strongly coupled electromechanical transducers

IEEE Transactions on Magnetics

Volumn 40, Issue 2 II, 2004, Pages 557-560

  Gyimesi, Miklos ^a   Avdeev, Ilya ^b   Ostergaard, Dale ^a  

^a ANSYS INC   (United States)

^b University of Pittsburgh   (United States)

Author keywords

Finite element methods; Micro electromechanical devices; Modeling; Transducers

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; FINITE ELEMENT METHOD; INTEGRATION; ITERATIVE METHODS; PERMITTIVITY; STIFFNESS MATRIX; TRANSDUCERS;

ELECTROMECHANICAL TRANSDUCERS; MORPHING; REDUCED ORDER MODEL (ROM);

MICROELECTROMECHANICAL DEVICES;

EID: 2342571623     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2004.824592     Document Type: Article

References (11)

1. W. C. Tang, T.-C. H. Nguyen, M. W. Judy, and R. T. Howe, "Electro-static-comb drive of lateral polysilicon resonators," Sens. Actuators A, vol. 21-23, pp. 328-331, 1990.
2. R. T. Howe, B. E. Boser, and A. P. Pisano, "Polysilicon integrated microsystems: technologies and applications," Sens. Actuators A, vol. 56, pp. 167-177, 1996.
3. A. J. Sangster and V. D. Samper, "Accuracy assessment of 2-D and 3-D FE models of a double-stator electrostatic wobble motor," J. Microelectromechan. Syst., vol. 6, pp. 142-150, June 1997.
4. ANSYS Release 5.6 User Manuals, 1999.
5. J. R. Gilbert, G. K. Ananthasuresh, and S. D. Senturia, "3D modeling of contact and hysteresis in coupled electro-mechanics," in Proc. MEMS'96, 1996, pp. 127-132.
6. M. Gyimesi and D. Ostergaard, "Electro-mechanical transducer for MEMS in ANSYS," in Proc. 1999 Int. Conf. Modeling/Simulation Microsystems, Apr. 1999.
7. I. Avdeev, M. Gyimesi, M. Lovell, and O. Onipede, "Beam modeling for simulation of MEMS transducers using strong coupling approach," in 6th U.S. Nat. Congr. Comput. Mech., Dearborn, MI, Aug. 1-4, 2001.
8. M. Gyimesi and D. Ostergaard, "FE based ROM of micro electro mechanical systems (MEMS)," in Int. Conf. MSM 2000, San Diego, CA, Mar. 27-29, 2000.
9. A. E. Fitzgerald, C. Kingsley, Jr., and S. D. Umans, Electric Machinery. New York: McGraw-Hill, 1990.
10. I. Vago and M. Gyimesi, Electromagnetic Fields. Budapest, Hungary: Akademia Kiado, 1998.
11. L. Castaner, J. Pons, R. Nadal-Guardia, and A. Rodriguez, "Analysis of the extended operation range of electrostatic actuators by current-pulse drive," Sens. Actuators A, vol. 90. pp. 181-190, 2001.