Analysis of the performance of a MEMS micromirror

IEEE Transactions on Magnetics

Volumn 40, Issue 2 II, 2004, Pages 1410-1413

  Wen, Jie ^a   Hoa, Xuyen D ^a   Kirk, Andrew G ^a   Lowther, David A ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

Benchmark; Design; Field modeling; MEMS

Indexed keywords

BENCHMARKING; DESIGN; ELECTROSTATICS; ETCHING; FABRICATION; INTEGRATED CIRCUITS; MICROMETERS; MICROOPTICS; OPTICAL SWITCHES; POLYSILICON; SILICON NITRIDE; TORQUE;

BENCHMARK; FIELD MODELING; RATION ANGLE; TWISTED BEAM STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 2342646296     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2004.824563     Document Type: Article

References (5)

1. J. I. Young and A. M. Shkel, "Comparative study of 2-DOF micromirrors for precision light manipulation," in Proc. SPIE: SPIE Smart Structures and Materials Conf., 2001.
2. D. A. Koester, R. Mahadevan, A. Shishkoff, and K. W. Markus, Smart MUMPS Design Handbook Including MUMPS Introduction and Design Rules, (rev. 4), Microelectronics Center of North Carolina, July 1996.
3. E. K. Chan, K. Garikipati, and R. W. Dutton, "Comprehensive static characterization of vertical electrostatically actuated polysilicon beams," IEE Design Test Comput., pp. 58-65, Oct.-Dec. 1999.
4. J. E. Lin, F. S. J. Michael, and A. G. Kirk, "Investigation of improved design for rotational micromirrors using multi-user MEMS processes," J. Microlithography, Microfabrication Microsyst., vol. 1, no. 1, pp. 70-78, 2002.
5. ElecNet User's Manual, Infolytica Corporation, Montreal, QC, Canada, 2002.