On the dynamics and modelling of a micro electromechanical structure (MEMS)

Proceedings of the 2002 International Conference on Noise and Vibration Engineering, ISMA

Volumn , Issue , 2002, Pages 1621-1629

  Bucher, I ^a   Elka, A ^a   Balmes, E ^b  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b Université Paris Saclay   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CANTILEVER BEAMS; ELECTRIC FIELDS; FINITE ELEMENT METHOD; GYROSCOPES; RESONANCE; SIGNAL PROCESSING; VISUALIZATION;

DYNAMIC-ELASTIC MODELS; ELECTROSTATIC FORCES; MICRO ELECTROMECHANICAL STRUCTURES; MODAL TESTING; RESONANCE MECHANISM;

MICROELECTROMECHANICAL DEVICES;

EID: 13444301174     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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2. O. Degani, Investigation of micro electromechanical systems incorporating modulated integrative differential optical sensing, M.Sc. thesis, Technion Israel, 1999
3. E. Balmes, Structural dynamics Toolbox for Matlab, User guide V 4.1, (2002)
4. M. H. Bao, Handbook of Sensors and actuators, Elsevier Amsterdam (200).
5. R. J. Craig and M. Bampton, "Coupling of substructures for dynamic analyses", AIAA Journal, vol.6,no.7,pp.1313-1319, 1968.
6. rd ed. (1999).
7. M. N. O. Sadiku, Numerical techniques in electromagnetics, CRC press, Boca Raton, (1992)
8. W. Gawronski, "Almost-Balanced Structural Dynamics", Journal of Sound and Vibration (1997) 202(5), pp. 669-687.