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Volumn , Issue , 2002, Pages 1621-1629
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On the dynamics and modelling of a micro electromechanical structure (MEMS)
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
CANTILEVER BEAMS;
ELECTRIC FIELDS;
FINITE ELEMENT METHOD;
GYROSCOPES;
RESONANCE;
SIGNAL PROCESSING;
VISUALIZATION;
DYNAMIC-ELASTIC MODELS;
ELECTROSTATIC FORCES;
MICRO ELECTROMECHANICAL STRUCTURES;
MODAL TESTING;
RESONANCE MECHANISM;
MICROELECTROMECHANICAL DEVICES;
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EID: 13444301174
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (8)
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