SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4334, Issue , 2001, Pages 328-335

Comparative study of 2-DOF micromirrors for precision light manipulation

(2) Young, J I a Shkel, A M a

a University of California at Irvine (United States)

Author keywords

Coupled field Modeling; Micromirror; Optical MEMS

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); ELECTRODES; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MIRRORS; MODAL ANALYSIS; OPTICAL SWITCHES; SIGNAL INTERFERENCE;

MICROMIRRORS; PRECISION LIGHT MANIPULATION;

OPTICAL COMMUNICATION;

EID: 0035155192 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.436617 Document Type: Conference Paper

Times cited : (5)

References (7)

1
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2
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- Electrostatic micro torsion mirrors for an optical switch matrix
- (1996) Journal of Microelectromechanical Systems , vol.5 , Issue.4 , pp. 231-237
- Toshiyoshi, H.¹ Fujita, H.²

3
- 0006419130
- Patent Number US-5995688, United States Patent Office
- (1999) Micro-Opto-Electromechanical Devices and Method Therfor
- Aksyuk, V.A.¹ Barber, B.P.²

4
- 0006451220
- Lucent microstar micromirror array technology for large optical crossconnects
- M. E. Motamedi and R. G eds
- MOEMS and Miniaturized Systems
- Aksyuk, V.¹ Pardo, F.²

5
- 0034545710
- Mechanical reliability of surface-micromachined self-assembling two-axis mems tilting mirrors
- MEMS Reliability for Critical Applications, R.A. Lawton, ed.
- (2000) Proceedings of SPIE , vol.4180 , pp. 86-90
- Gasparyan, A.¹ Aksyuk, V.²

6
- 0006463411
- University of California Irvine Office of Technolgy Alliances, Disclosure Application Date: February 10
- (2001) Micromachined 2-DOF Micromirror for Precision Light Manipulation
- Young, J.I.¹ Shkel, A.M.²

7
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- McGraw Hill Inc., New York
- (1989) Roark's Formulas for Stress and Strain
- Young, W.C.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.