Soft 20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures

Optics Letters

Volumn 28, Issue 21, 2003, Pages 2019-2021

  Chao, Weilun ^a,b   Anderson, Erik ^a   Denbeaux, Gregory P ^a   Harteneck, Bruce ^a   Alexander Liddle, J ^a   Olynick, Deirdre L ^a   Pearson, Angelic L ^a   Salmassi, Farhad ^a   Song, Cheng Yu ^a   Attwood, David T ^a,b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LENSES; MULTILAYERS; NANOSTRUCTURED MATERIALS; TRANSMISSION ELECTRON MICROSCOPY; X RAY MICROSCOPES;

FRESNEL ZONE PLATE LENSES;

X RAY OPTICS;

EID: 0242301684     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.28.002019     Document Type: Article

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