Demonstration of 20 nm half-pitch spatial resolution with soft x-ray microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 3108-3111

  Chao, W ^a   Anderson, E H ^a   Denbeaux, G ^a   Harteneck, B ^a   Pearson, A L ^a   Olynick, D ^a   Salmassi, F ^a   Song, C ^a   Attwood, D ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; ELECTRON BEAM LITHOGRAPHY; ELECTROPLATING; MAGNETRON SPUTTERING; MULTILAYERS; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SPATIAL VARIABLES MEASUREMENT; TRANSMISSION ELECTRON MICROSCOPY; X RAY MICROSCOPES;

CONDENSER ZONE PLATE (CZP); PHOTON ENERGIES;

IMAGING SYSTEMS;

EID: 0942300018     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1619956     Document Type: Conference Paper

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