MEMS- And Probe-based mass data storage in conventional CMOS

International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT

Volumn 3, Issue , 2004, Pages 1842-1847

  Lu, Michael S C ^a   Min, Seungook ^b   Tzeng, Shien Der ^a   Gwo, Shangjr ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CANTILEVER BEAMS; CMOS INTEGRATED CIRCUITS; DATA STORAGE EQUIPMENT; ELECTROSTATICS; SIGNAL THEORY;

MICRO TIP-CANTILEVERS; NON-VOLATILE MASS DATA STORAGE; STORAGE DENSITY; TIME-VARYING CONTROLLERS;

MICROELECTROMECHANICAL DEVICES;

EID: 21644442483     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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