Ex situ spectroscopic ellipsometry investigations of chemical vapor deposited nanocomposite carbon thin films

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 422-428

  Gupta, S ^a   Weiner, B R ^b   Morell, G ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF PUERTO RICO   (Puerto Rico)

Author keywords

Hot filament chemical vapor deposition; Nanocomposite carbon thin film; Spectroscopic ellipsometry; Structure and microstructure; Synthesis and characterization

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRON EMISSION; HYDROGEN SULFIDE; MICROSTRUCTURE; MIXTURES; MOLYBDENUM; NANOSTRUCTURED MATERIALS; SPECTROSCOPIC ANALYSIS; SYNTHESIS (CHEMICAL);

HOT FILAMENT CHEMICAL VAPOR DEPOSITION; NANOCOMPOSITE CARBON THIN FILMS; SPECTROSCOPIC ELLIPSOMETRY; STRUCTURE AND MICROSTRUCTURE; SYNTHESIS AND CHARACTERIZATION;

THIN FILMS;

EID: 2142708025     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.238     Document Type: Conference Paper

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