Comparison of P, N and B additions during CVD diamond deposition

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 171-178

  Haubner, R ^a   Bohr, S ^a   Lux, B ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Boron; Diamond; Hot filament; Nitrogen; Phosphorus

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; CRYSTAL ORIENTATION; FILM GROWTH; MORPHOLOGY; NITROGEN; PHOSPHORUS; SUPERSATURATION; THERMODYNAMIC STABILITY;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION (HFCVD);

DIAMOND FILMS;

EID: 0032607241     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00270-2     Document Type: Review

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