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Volumn 182, Issue 2-3, 2004, Pages 335-341

Nano- and micro-scale wear of fluorinated carbon films

Author keywords

Abrasive wheel test; Amorphous; Atomic force microscopy; Carbon; Photoelectron spectroscopy; Plasma assisted chemical vapor deposition

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASTIC FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 2142647372     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.08.075     Document Type: Article
Times cited : (19)

References (25)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.