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Volumn 182, Issue 2-3, 2004, Pages 335-341
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Nano- and micro-scale wear of fluorinated carbon films
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Author keywords
Abrasive wheel test; Amorphous; Atomic force microscopy; Carbon; Photoelectron spectroscopy; Plasma assisted chemical vapor deposition
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
COMPOSITION;
MICROSTRUCTURE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASTIC FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
FLUORINATED CARBON FILMS;
PROTECTIVE COATINGS;
COATING;
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EID: 2142647372
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.08.075 Document Type: Article |
Times cited : (19)
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References (25)
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