Ion-, photoelectron- and laser-assisted analytical investigation of nano-structured mixed HfO2-SiO2 and ZrO 2-SiO2 thin films

Applied Surface Science

Volumn 249, Issue 1-4, 2005, Pages 277-294

  Armelao, L ^a   Bleiner, D ^b   Di Noto, V ^a   Gross, S ^a   Sada, C ^a   Schubert, U ^c   Tondello, E ^a   Vonmont, H ^b   Zattin, A ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^c VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

HfO2; LA ICP MS; Multicomponent oxides; SIMS; Sol gel; Thin films; XPS; ZrO2

Indexed keywords

ALLOYING; HAFNIUM COMPOUNDS; INDUCTIVELY COUPLED PLASMA; IONS; LASER APPLICATIONS; MIXING; NANOSTRUCTURED MATERIALS; PHOTOELECTRICITY; SECONDARY ION MASS SPECTROMETRY; SILICA; SOL-GELS; ZIRCONIUM COMPOUNDS;

HFO2; LA-ICP-MS; MULTICOMPONENT OXIDES; ZRO2;

THIN FILMS;

EID: 21244461927     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.12.008     Document Type: Article

References (20)

1. L. Manchanda, M.D. Morris, M.L. Green, R.B. Van Dover, F. Klemens, T.W. Sorsch, P.J. Silverman, G. Wilk, B. Busch, and S. Aravamudhan Microelect. Eng. 59 2001 351
2. Special Issue, Microelect. Eng. 59 (2001) and references therein.
3. L. Houssiau, R.G. Vitchev, T. Conrad, W. Vandervorst, and H. Bender Appl. Surf. Sci. 231/232 2004 585
4. G.D. Wilk, R.M. Wallace, and J.M. Anthony J. Appl. Phys. 89 2001 5243
5. G.D. Wilk, R.M. Wallace, and J.M. Anthony J. Appl. Phys. 87 2000 484
6. G.D. Wilk, and R.M. Wallace Appl. Phys. Lett. 74 1999 2854
7. G.D. Wilk, and R.M. Wallace Appl. Phys. Lett. 76 2000 112
8. D.A. Neumayer, and E. Cartier J. Appl. Phys. 90 4 2001 1801
9. J.P. Maria, D. Wickaksana, J. Parrette, and A.I. Kingon J. Mater. Res. 17 7 2002 1571
10. G. Mountjoy, M.A. Holland, P. Gunawidjaja, G.W. Wallidge, D.M. Pickup, R.J. Newport, and M.E. Smith J. Sol-gel Sci. Technol. 26 2003 161
11. Z. Zhan, and H.C. Zeng J. Non-Cryst. Solids 243 1999 26
12. J.B. Miller, and E.I. Ko Catal. Today 35 1997 269
13. L. Armelao, C. Eisenmenger-Sittner, M. Groenenwolt, S. Gross, C. Sada, U. Schubert, E. Tondello, A. Zattin, J. Mater. Chem., in press.
14. G. Trimmel, S. Gross, G. Kickelbick, and U. Schubert Appl. Organomet. Chem. 15 2001 406
15. S. Gross, G. Kickelbick, M. Puchberger, and U. Schubert Monatshefte für Chemie 134 2003 1053
16. J.F. Moulder, W.F. Stickle, P.E. Sobol, and K.D. Bomben Handbook of X-ray Photoelectron Spectroscopy 1992 Perkin-Elmer Corporation Eden Prairie, MN
17. D. Bleiner GIT Lab. J. 2 2004 40
18. M.P. Seah D. Briggs M.P. Seah Practical Surface Analysis vol. 1 1990 Wiley 543
19. S.C. Moon, M. Fujino, H. Yamashita, and M. Anpo J. Phys. Chem. B 101 1997 369
20. M. Vittadello, S. Suarez, S.H. Chung, K. Fujimoto, V. Di Noto, S.G. Greenbaum, and T. Furukawo Electrochim. Acta 48 2003 2227