SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 666, Issue , 2001, Pages F611-F619

Relationships between microstructure and reliability in PZT MEMS

(5) Olson, B W a Randall, L M a Richards, C D a Richards, R F a Bahr, D F a

a Washington State University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMPUTER SIMULATION; DEPOSITION; ELECTRON MICROSCOPY; FATIGUE TESTING; GRAIN SIZE AND SHAPE; MICROCRACKS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROSTRUCTURE; SILICON WAFERS; SOL-GELS; SPIN COATING;

SCANNING PROBE MICROSCOPY;

PIEZOELECTRIC MATERIALS;

EID: 0035557043 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: 10.1557/proc-666-f6.1 Document Type: Article

Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.