Study of PZT film stress in multilayer structures for MEMS devices

Materials Research Society Symposium - Proceedings

Volumn 605, Issue , 2000, Pages 287-292

  Zakar, E ^a   Dubey, M ^a   Polcawich, R ^a,b   Piekarski, B ^a   Piekarz, R ^a   Conrad, J ^a   Widuta, R ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b GTS ^*

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; MECHANICAL VARIABLES MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAPID THERMAL ANNEALING; RESIDUAL STRESSES; SILICA; SILICON NITRIDE; TENSILE STRESS; THICKNESS MEASUREMENT;

FURNACE ANNEALING; LEAD ZIRCONATE TITANATE FILM STRESS; SOL-GEL DERIVED LEAD ZIRCONATE TITANATE;

LEAD COMPOUNDS;

EID: 0034510814     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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5. th IEEE Int. Symp. Appl. Ferroelectrics, p. 527 (1994)
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