A three-dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips

Journal of Micromechanics and Microengineering

Volumn 15, Issue 7, 2005, Pages

  Gollasch, C O ^a   Moktadir, Z ^a   Kraft, M ^a   Trupke, M ^b   Eriksson, S ^b   Hinds, E A ^b  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROMACHINING; MICROPROCESSOR CHIPS; MICROSTRUCTURE; MIRRORS; OPTICAL FIBERS;

ATOM CHIPS; ELECTROSTATIC ACTUATOR; MICROCAVITIES; NEUTRAL ATOMS;

MICROELECTROMECHANICAL DEVICES;

EID: 21044438760     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/7/006     Document Type: Article

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