Etching techniques for realizing optical micro-cavity atom traps on silicon

Journal of Micromechanics and Microengineering

Volumn 14, Issue 9, 2004, Pages

  Moktadir, Z ^a   Koukharenka, E ^a   Kraft, M ^a   Bagnall, D M ^a   Powell, H ^b   Jones, M ^b   Hinds, E A ^b  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COATINGS; ELECTRON TRAPS; GOLD COMPOUNDS; MICROPROCESSOR CHIPS; MIRRORS; OPTICAL FIBERS; SILICON; SURFACE ROUGHNESS;

ATOM TRAPS; MICRO-CAVITY; SILICON OXIDE; SINGLE ATOMS;

DRY ETCHING;

EID: 4544244581     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/9/014     Document Type: Conference Paper

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