High-spatial-resolution strain measurements by Auger electron spectroscopy in epitaxial-lateral-overgrowth GaN

Applied Physics Letters

Volumn 86, Issue 21, 2005, Pages 1-3

  Cai, Duanjun ^a   Xu, Fuchun ^a   Kang, Junyong ^a   Gibart, Pierre ^b   Beaumont, Bernard ^b  

^a XIAMEN UNIVERSITY   (China)

^b LUMILOG   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; EPITAXIAL GROWTH; GALLIUM NITRIDE; PHOTOLUMINESCENCE; RAMAN SCATTERING; THERMAL EXPANSION; X RAYS;

AUGER PHYSICAL SHIFTS; EPITAXIAL-LATERAL-OVERGROWTH; HIGH-SPATIAL-RESOLUTION; STRUCTURAL COMPLEXITY;

STRAIN;

EID: 20844462351     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1929866     Document Type: Article

References (24)

1. M. Holtz, M. Seon, T. Prokofyeva, H. Temkin, R. Singh, F. P. Dabkowski, and T. D. Moustakas, Appl. Phys. Lett. 75, 1757 (1999).
2. J. M. Hayes, M. Kuball, A. Bell, I. Harrison, D. Korakakis, and C. T. Foxon, Appl. Phys. Lett. 75, 2097 (1999).
3. W. Rieger, T. Metzger, H. Angerer, R. Dimitrov, O. Ambacher, and M. Stutzmann, Appl. Phys. Lett. 68, 970 (1996).
4. A. B. M. A. Ashrafi, N. T. Binh, B. P. Zhang, and Y. Segawa, Appl. Phys. Lett. 84, 2814 (2004).
5. D. E. Ramaker, CRC Crit. Rev. Solid State Mater. Sci. 17, 211 (1991).
6. C. S. Fadley, J. Chem. Phys. 48, 3779 (1968).
7. C. D. Wagner, Faraday Discuss. Chem. Soc. 60, 291 (1975).
8. Y. Zhu and L. Cao, Surf. Sci. 133, 213 (1998).
9. T. S. Zheleva, O. H. Nam, M. D. Bremser, and R. F. Davis, Appl. Phys. Lett. 71, 2472 (1997).
10. A. Usui, H. Sunakawa, A. Sakai, and A. Yamaguchi, Jpn. J. Appl. Phys., Part 2 36, L899 (1997).
11. F. Bertram, T. Riemann, J. Christen, A. Kaschner, A. Hoffmann, C. Thomsen, K. Hiramatsu, T. Shibata, and N. Sawaki, Appl. Phys. Lett. 74, 359 (1999).
12. M. Kuball, M. Benyoucef, B. Beaumont, and P. Gibart, J. Appl. Phys. 70, 3656 (2001).
13. Z. Zytkiewicz, Thin Solid Films 412, 64 (2002).
14. P. Venńgùs, B. Beaumont, V. Bousquet, M. Vaille, and P. Gibart, J. Appl. Phys. 87, 4175 (2000).
15. K. Prabhakaran, T. G. Andersson, and K. Nozawa, Appl. Phys. Lett. 69, 3212 (1996).
16. P. J. Feibelman and E. J. McGuire, Phys. Rev. B 17, 690 (1978).
17. D. E. Ramaker, F. L. Hutson, N. H. Turner, and W. N. Mei, Phys. Rev. B 33, 2574 (1986).
18. P. Hohenberg and W. Khon, Phys. Rev. 136, B864 (1964).
19. W. Khon and L. J. Sham, Phys. Rev. 140, A1133 (1965).
20. D. Cai, J. Kang, and Z. Zhu, Phys. Rev. B 68, 073305 (2003).
21. M. Maeda and K. Ikeda, J. Appl. Phys. 83, 3865 (1998).
22. H. P. Maruska and J. J. Tietjen, Appl. Phys. Lett. 15, 327 (1969).
23. M. Benyoucef, M. Kuball, G. Hill, M. Wisnom, B. Beaumont, and P. Gibart, Appl. Phys. Lett. 79, 4127 (2001).
24. S. Gradecak, P. Stadelmann, V. Wagner, and M. Ilegems, Appl. Phys. Lett. 85, 4648 (2004).