메뉴 건너뛰기




Volumn 114, Issue 1, 2004, Pages 5-15

Metrologische Rastersondenmikroskope - Messgeräte für die dimensionelle Nanometrologie

Author keywords

[No Author keywords available]

Indexed keywords


EID: 2042471486     PISSN: 0030834X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (3)

References (22)
  • 1
    • 0028494170 scopus 로고
    • Design and three dimensional calibration of a measuring scanning tunneling microscope for metrological applications
    • S. 2514 ff
    • Jusko, O.; Zhao, X.; Wolff H.; Wilkening, G.: Design and three dimensional calibration of a measuring scanning tunneling microscope for metrological applications. Rev. Sci. Instrum. 65, (1994), S. 2514 ff.
    • (1994) Rev. Sci. Instrum. , vol.65
    • Jusko, O.1    Zhao, X.2    Wolff, H.3    Wilkening, G.4
  • 3
    • 2042510363 scopus 로고    scopus 로고
    • Normale für die dimensionelle und analytische Nanometrologie
    • in diesem Heft
    • Koenders, L.; Dziomba, T.; Thomsen-Schmidt, P.; Senoner, M.: Normale für die dimensionelle und analytische Nanometrologie. PTB-Mitteilungen 114 (2004), S. 16-24 (in diesem Heft)
    • (2004) PTB-Mitteilungen , vol.114 , pp. 16-24
    • Koenders, L.1    Dziomba, T.2    Thomsen-Schmidt, P.3    Senoner, M.4
  • 4
    • 0036538953 scopus 로고    scopus 로고
    • A compact sensor-head for simultaneous scanning force and near-field optical microscopy
    • Dal Savio, C.; Wolff, H.; Dziomba, T.; Fuβ, H.-A.; Danzebrink, H.-U.: A compact sensor-head for simultaneous scanning force and near-field optical microscopy. Precision Engineering 26 (2002), S. 199-203
    • (2002) Precision Engineering , vol.26 , pp. 199-203
    • Dal Savio, C.1    Wolff, H.2    Dziomba, T.3    Fu, H.-A.4    Danzebrink, H.-U.5
  • 5
    • 0037387611 scopus 로고    scopus 로고
    • Optical microscope with SNOM option for micro- and nanoanalytical investigations at low temperatures
    • Danzebrink, H.-U.; Kazantsev, D. V.; Dal Savio, C.; Pierz, K.; Güttler, B.: Optical microscope with SNOM option for micro- and nanoanalytical investigations at low temperatures. Appl. Phys. A 76 (2003), S. 889-892
    • (2003) Appl. Phys. A , vol.76 , pp. 889-892
    • Danzebrink, H.-U.1    Kazantsev, D.V.2    Dal Savio, C.3    Pierz, K.4    Güttler, B.5
  • 6
    • 21544472129 scopus 로고
    • Atomic resolution with an atomic force microscope using piezoresistive detection
    • Tortonese, M.; Barrett, R. C.; Quate, C. F.: Atomic resolution with an atomic force microscope using piezoresistive detection. Appl. Phys. Lett. 62 (1993), S. 834-836
    • (1993) Appl. Phys. Lett. , vol.62 , pp. 834-836
    • Tortonese, M.1    Barrett, R.C.2    Quate, C.F.3
  • 7
    • 0043138979 scopus 로고    scopus 로고
    • Bridge configuration of piezoresistive devices for scanning force microscopes
    • Jumpertz, R.; Schelten, J.; Ohlsson, O.; Saurenbach, F.: Bridge configuration of piezoresistive devices for scanning force microscopes. Sensors and Actuators A 70 (1998), S. 88-91
    • (1998) Sensors and Actuators A , vol.70 , pp. 88-91
    • Jumpertz, R.1    Schelten, J.2    Ohlsson, O.3    Saurenbach, F.4
  • 10
    • 0346281216 scopus 로고    scopus 로고
    • Development of a scanning probe microscope compact sensor head featuring a diamond probe mounted on a quartz tuning fork
    • Tyrrell, J. W. G.; Sokolov, D. V.; Danzebrink, H.-U.: Development of a scanning probe microscope compact sensor head featuring a diamond probe mounted on a quartz tuning fork. Meas. Sci. Technol. 14 (2003), S. 2139-2143
    • (2003) Meas. Sci. Technol. , vol.14 , pp. 2139-2143
    • Tyrrell, J.W.G.1    Sokolov, D.V.2    Danzebrink, H.-U.3
  • 12
    • 84888976233 scopus 로고    scopus 로고
    • Development of a combined interference microscope objective and scanning probe microscope
    • zur Veröffentlichung angenommen
    • Tyrrell, J. W. G.; Dal Savio, C.; Krüger-Sehm, R.; Danzebrink, H.-U.: Development of a combined interference microscope objective and scanning probe microscope. Bei Rev. Sci. Instrum, zur Veröffentlichung angenommen.
    • Bei Rev. Sci. Instrum
    • Tyrrell, J.W.G.1    Dal Savio, C.2    Krüger-Sehm, R.3    Danzebrink, H.-U.4
  • 13
    • 0000501234 scopus 로고    scopus 로고
    • A metrological scanning force microscope used for coating thickness and other topographical measurements
    • Bienias, M.; Gao, S.; Hasche, K.; Seemann, R.; Thiele, K.: A metrological scanning force microscope used for coating thickness and other topographical measurements. Applied Phys. A 66 (1998), S. 837-842
    • (1998) Applied Phys. A , vol.66 , pp. 837-842
    • Bienias, M.1    Gao, S.2    Hasche, K.3    Seemann, R.4    Thiele, K.5
  • 15
    • 2042528018 scopus 로고    scopus 로고
    • Comparison on Nanometrology - NANO2: Step height
    • Koenders, L. et al.: Comparison on Nanometrology - NANO2: Step height. Metrologia 40 (2003), 04001
    • (2003) Metrologia , vol.40 , pp. 04001
    • Koenders, L.1
  • 17
    • 1342329504 scopus 로고    scopus 로고
    • Improving the performance of interferometers in metrological scanning probe microscopes
    • Dai, G.; Pohlenz, F.; Danzebrink, H.-U.; Hasche, K.; Wilkening, G.: Improving the performance of interferometers in metrological scanning probe microscopes. Meas. Sci. Technol. 15 (2004), S. 444-450
    • (2004) Meas. Sci. Technol. , vol.15 , pp. 444-450
    • Dai, G.1    Pohlenz, F.2    Danzebrink, H.-U.3    Hasche, K.4    Wilkening, G.5
  • 18
    • 0019621824 scopus 로고
    • Determination and correction of quadrature fringe measurement errors in interferometers
    • Heydemann, P.: Determination and correction of quadrature fringe measurement errors in interferometers. Applied Opt. 20 (1981), S. 3382-3384
    • (1981) Applied Opt. , vol.20 , pp. 3382-3384
    • Heydemann, P.1
  • 19
    • 0032118306 scopus 로고    scopus 로고
    • Long range AFM profiler used for accurate pitch measurements
    • Meas. Sci. Technol., Special issue on
    • Meli, F.; Thalmann, R.: Long range AFM profiler used for accurate pitch measurements. Meas. Sci. Technol., Special issue on Dimensional Metrology 9 (7) (1998), S. 1087-1092
    • (1998) Dimensional Metrology , vol.9 , Issue.7 , pp. 1087-1092
    • Meli, F.1    Thalmann, R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.