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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5662, Issue , 2004, Pages 313-318

Development of EUV light source by CO2 laser-produced plasma with nano-structured SnO2 targets

(4) Tanaka, H a Akinaga, K a Takahashi, A a Okada, T a

a KYUSHU UNIVERSITY (Japan)

Author keywords

CO2 laser; Extreme ultraviolet; Laser produced plasma; Nano particle; SnO 2; Spectrograph

Indexed keywords

ABSORPTION; CARBON DIOXIDE LASERS; LASER PRODUCED PLASMAS; LIGHT SOURCES; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; PUMPING (LASER); SEMICONDUCTOR DEVICES; TIN COMPOUNDS; XENON;

EXTREME ULTRAVIOLET; LASER-PRODUCED PLASMA; SNO2; SPECTROGRAPH;

ULTRAVIOLET RADIATION;

EID: 20344391392 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.596357 Document Type: Conference Paper

Times cited : (3)

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