The electrical, optical and structural properties of InxZn 1-xOy (0 ≤ x ≤ 1) thin films by combinatorial techniques

Measurement Science and Technology

Volumn 16, Issue 1, 2005, Pages 90-94

  Taylor, Matthew P ^a   Readey, Dennis W ^a   Teplin, Charles W ^b   van Hest, Maikel F A M ^b   Alleman, Jeff L ^b   Dabney, Matthew S ^b   Gedvilas, Lynn M ^b   Keyes, Brian M ^b   To, Bobby ^b   Perkins, John D ^b   Ginley, David S ^b  

^a Department of Geology and Geological Engineering   (United States)

^b NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

Combinatorial; Indium zinc oxide; Sputtering; Thin films; Transparent conducting oxide

Indexed keywords

CARRIER CONCENTRATION; CRYSTALLINE MATERIALS; MAGNETRON SPUTTERING; THIN FILMS; ZINC OXIDE;

COMBINATORIAL TECHNIQUES; INDIUM-ZINC-OXIDE (IZO); OPTICAL TRANSPARENCY;

INDIUM COMPOUNDS;

ELECTRICAL PROPERTY; FILM;

EID: 19944432349     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/16/1/012     Document Type: Article

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