Development of specimen and test method for strength analysis of MEMS micromirror

Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A

Volumn 71, Issue 3, 2005, Pages 387-393

  Izumi, Satoshi ^a   Ping, Chan Wee ^a   Yamaguchi, Makoto ^a   Sakai, Shinsuke ^a   Ueda, Yuzuru ^a   Suzuki, Atsushi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Brittle Fracture; Finite Element Method; Fracture Mechanics; Load Factor; MEMS; Torsion; Weibull Distribution

Indexed keywords

BRITTLE FRACTURE; FINITE ELEMENT METHOD; FRACTURE MECHANICS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; STRESS CONCENTRATION; WEIBULL DISTRIBUTION;

FRACTURED STRESSES; LOAD FACTOR; MICROMIRRORS; STRENGTH ANALYSIS;

STRENGTH OF MATERIALS;

EID: 19944363233     PISSN: 03875008     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaia.71.387     Document Type: Article

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