Growth of bulk SiGe single crystals by liquid phase diffusion

Journal of Crystal Growth

Volumn 280, Issue 1-2, 2005, Pages 151-160

  Yildiz, M ^a   Dost, S ^a   Lent, B ^b  

^a UNIVERSITY OF VICTORIA   (Canada)

^b DL Crystals Inc   (Canada)

Author keywords

A1. Diffusion; A2. Single crystal; A3. Liquid phase; B2. Silicon, Germanium

Indexed keywords

CHARACTERIZATION; CRYSTAL GROWTH; DIFFUSION; ETCHING; GERMANIUM; HETEROJUNCTION BIPOLAR TRANSISTORS; SINGLE CRYSTALS; X RAY ANALYSIS;

CHEMICAL ETCHING; COMPOSITIONAL MAPPING; LIQUID PHASE DIFFUSION (LPD); LIQUID PHASE ELECTROPITAXY (LPEE);

SILICON COMPOUNDS;

EID: 19944363179     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.03.030     Document Type: Article

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