Czochralski growth of Si- and Ge-rich SiGe single crystals

Journal of Crystal Growth

Volumn 174, Issue 1-4, 1997, Pages 182-186

  Abrosimov, N V ^a,b   Rossolenko, S N ^a,b   Thieme, W ^b   Gerhardt, A ^b   Schroder W ^b  

^a INSTITUTE OF SOLID STATE PHYSICS   (Russian Federation)

^b LEIBNIZ INSTITUTE FOR CRYSTAL GROWTH   (Germany)

Author keywords

Automated control; Czochralski technique; SiGe; Weight technique

Indexed keywords

CRYSTAL GROWTH FROM MELT; SEMICONDUCTING SILICON; SILICON ALLOYS; WEIGHT CONTROL;

AUTOMATED CONTROL SYSTEMS;

SINGLE CRYSTALS;

EID: 0031547291     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)01102-5     Document Type: Article

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