Actinic detection and signal characterization of multilayer defects on EUV mask blanks

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5567, Issue PART 2, 2004, Pages 791-799

  Tezuka, Yoshihiro ^a   Ito, Masaaki ^a   Terasawa, Tsuneo ^a   Tomie, Toshihisa ^b  

^a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Actinic inspection; Detection algorithm; EUV; Mask blanks; Phase defect

Indexed keywords

ALGORITHMS; ATOMIC FORCE MICROSCOPY; CAMERAS; CHARGE COUPLED DEVICES; CORRELATION METHODS; IMAGING TECHNIQUES; MASKS; MULTILAYERS; ULTRAVIOLET RADIATION;

ACTINIC INSPECTION; DETECTION ALGORITHM; EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL); MASK BLANKS; PHASE DEFECT;

LITHOGRAPHY;

EID: 19844380017     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.568379     Document Type: Conference Paper

References (10)

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